Applications
Removal of organic containment, polymer activation, metal deoxidation, PR descum, polymerization coating.
Features
Non-destructive cleaning
Superior deoxidation cleaning capability
Excellent cleaning selectivity
Low process temperature
Compact structure
Intuitive user interface
Specifications
Plasma Generator | 2.45 GHz, 100-500W |
Internal Chamber Size | W225mm✕H225mm✕D225mm |
Chamber Material | Aerospace-grade aluminum alloy |
Gas Channels | Standard with 2 MFCs (more on request) |
Vacuum Gauge | Pirani gauge |
Chamber Vacuum | Better than 5 Pa |
Worktable | Available |
Control System | PLC&Touchscreen |
Power Supply | 380V, 50/60Hz |
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