Inline High-Density Microwave Plasma System AMP-20LA
  • Inline High-Density Microwave Plasma System AMP-20LA
  • Inline High-Density Microwave Plasma System AMP-20LA

Inline High-Density Microwave Plasma System AMP-20LA

Inline High-Density Microwave Plasma System

Applications

Utilizing a microwave source array, it generates high-density plasma to rapidly remove microscopic contaminants from material surfaces. Equipped with an advanced automated control system and high-efficiency automatic loading/unloading assembly, it seamlessly connects with upstream and downstream production line equipment, significantly enhancing processing efficiency.


Features

Non-destructive cleaning

High-density plasma

Highly uniform cleaning effects

Fast cleaning cycle

Superior deoxidation cleaning capability

Automatic control system


Specifications

Plasma Generator

2.45 GHz, max 2000W

Internal Chamber Size

W370mm✕D560mm✕H70mm

Chamber Material

Aerospace-grade aluminum alloy

Gas Channels

Standard with 2 MFCs, more on request

Vacuum Gauge

Pirani gauge

Vacuum Pump

Dry or oil pump

Chamber Vacuum

Better than 5 Pa

Operation Flow

Automatic loading & cleaning & unloading

Control System

IPC+PLC

Power Supply

380V, 50/60Hz